The Vacuum Oil Purifier is designed under the saturation vapor pressure difference principle of water and oil, adopted the mature film evaporation techniques. The oil will be full atomization under high vacuum pressure to achieve the purpose of oil-water-gases separation. It is adopted high vacuum pumps with high pumping rate, the oil film areas formed by this plant more than three times by the general vacuum oil filter plant, the dehydration rate is increased by 1.7 times. Vacuum Oil Purifier is used high-performance series filters to remove impurities in oils, which can filter off all the solid particles and impurities large than 1 micron or as customer’s requirements. The purified oil can achieve the United States Space Cleanliness Standards NASA1638-5 level.